JPH089619Y2 - テンションセンサ - Google Patents

テンションセンサ

Info

Publication number
JPH089619Y2
JPH089619Y2 JP1990053814U JP5381490U JPH089619Y2 JP H089619 Y2 JPH089619 Y2 JP H089619Y2 JP 1990053814 U JP1990053814 U JP 1990053814U JP 5381490 U JP5381490 U JP 5381490U JP H089619 Y2 JPH089619 Y2 JP H089619Y2
Authority
JP
Japan
Prior art keywords
measured
target
tension
air
tension sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990053814U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0415031U (en]
Inventor
宏俊 石川
政一郎 清部
幸彦 高松
豊 斎藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1990053814U priority Critical patent/JPH089619Y2/ja
Publication of JPH0415031U publication Critical patent/JPH0415031U/ja
Application granted granted Critical
Publication of JPH089619Y2 publication Critical patent/JPH089619Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
JP1990053814U 1990-05-23 1990-05-23 テンションセンサ Expired - Lifetime JPH089619Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990053814U JPH089619Y2 (ja) 1990-05-23 1990-05-23 テンションセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990053814U JPH089619Y2 (ja) 1990-05-23 1990-05-23 テンションセンサ

Publications (2)

Publication Number Publication Date
JPH0415031U JPH0415031U (en]) 1992-02-06
JPH089619Y2 true JPH089619Y2 (ja) 1996-03-21

Family

ID=31575324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990053814U Expired - Lifetime JPH089619Y2 (ja) 1990-05-23 1990-05-23 テンションセンサ

Country Status (1)

Country Link
JP (1) JPH089619Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7682636B2 (ja) * 2021-02-05 2025-05-26 株式会社東京精密 ダイシングテープの張力異常検知装置及び方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5144428A (ja) * 1974-10-14 1976-04-16 Wakamoto Seisakusho Kk Konpyuutaanyuryokuyodeetasakuseihoho
US5029469A (en) * 1988-06-17 1991-07-09 Measurex Corporation Sheet tension sensor
JPH0798604B2 (ja) * 1988-06-21 1995-10-25 株式会社東京機械製作所 張力検出装置及び張力制御装置

Also Published As

Publication number Publication date
JPH0415031U (en]) 1992-02-06

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